Manufacturing method of thin-film magnetic head and thin-film magnetic head
AssigneeTDK Corporation
InventorsTakeo Kagami, Takayasu Kanaya, Noriaki Kasahara, Kazuki Sato
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AssigneeTDK Corporation
InventorsTakeo Kagami, Takayasu Kanaya, Noriaki Kasahara, Kazuki Sato
Estimating the term…
A manufacturing method of a thin-film magnetic head includes a step of depositing an MR multi-layered film on a lower electrode layer, a step of patterning the deposited MR multi-layered film to define a track width, a step of forming a layer containing at least first insulation layer at both track-width direction sides of the patterned MR multi-layered film, a step of depositing a first additional upper metal layer on the patterned MR multi-layered film and on the layer containing at least first insulation layer, a step of patterning the first additional upper metal layer and the MR multi-layered film to define a length in a direction perpendicular to the track-width direction so as to obtain an MR multi-layered structure, a step of forming a second insulation layer to surround the first additional upper metal layer and the MR multi-layered structure, a step of removing by etching the second insulation layer on the first additional upper metal layer formed on the MR multi-layered structure, a step of thereafter, forming a second additional upper metal layer on the first additional upper metal layer and on the second insulation layer, and a step of forming an upper electrode layer on the second additional upper metal layer.
A manufacturing method of a thin-film magnetic head, comprising the steps of:
A thin-film magnetic head, comprising:
Dependencies are inferred from the claim text.