Confocal microscope
AssigneeNikon Corporation
InventorHisashi Okugawa
Life of this patent
Estimating the term…
Abstract
A confocal microscope includes: a first condenser optical system that condenses light from a light source onto a sample; a pinhole member having a pinhole; a second condenser optical system that condenses light from the sample into the pinhole; a polygon mirror having a plurality of mirror surfaces achieving angles relative to a rotational axis different from one another and formed so as to surround the rotational axis in a full circle, which is disposed between the first condenser optical system and the pinhole; and a first optical system that separates the light from the light source and the light from the sample and guides the light from the sample departing the polygon mirror to the pinhole.
Claims16
A confocal microscope comprising:
- a first condenser optical system that condenses light from a light source onto a sample;
- a pinhole member having a pinhole;
- a second condenser optical system that condenses light from the sample into the pinhole;
- a polygon mirror having a plurality of mirror surfaces achieving angles relative to a rotational axis different from one another and formed so as to surround the rotational axis in a full circle, which is disposed between the first condenser optical system and the pinhole;
- and
- a first optical system that separates the light from the light source and the light from the sample and guides the light from the sample departing the polygon mirror to the pinhole.
Dependencies are inferred from the claim text.