Back to results
US 2006/0066937 A1Published application
Mems switch with set and latch electrodes
AssigneeIdc, LLC
InventorClarence Chui
Life of this patent
Estimating the term…
Abstract
Abstract of the Disclosure A MEMS device is electrically actuated with a voltage placed across a first electrode (702) and a moveable material (714). The device may be maintained in an actuated state by latch electrodes (730a, 730b) that are separate from the first electrode.
Claims24
A MEMS device comprising:
- a substrate;
- at least two support posts supported by said substrate;
- at least two electrically isolated electrodes supported by said substrate and positioned between said support posts;
- a moveable electrode supported above said substrate by said support posts;
- and
- at least two switch terminals that are selectably connectable depending on the position of the moveable electrode.
3 more elements
A display system comprising:
- an array of MEMS display elements;
- one or more MEMS switches coupled to said array, wherein at least one of said MEMS switches comprises:
- a substrate;
- at least two support posts supported by said substrate;
- at least two electrically isolated electrodes supported by said substrate and positioned between said support posts;
- a moveable electrode supported above said substrate by said support posts;
- and
- at least two switch terminals that are selectably connectable depending on the position of the moveable electrode.
5 more elements
A method of operating a MEMS switch comprising:
- controlling switch actuation by moving a moveable element from a first position to a second position by applying a first voltage across a first electrode and second electrode;
- and
- maintaining said moveable element in said second position by applying a second voltage across said first electrode and a third electrode.
A MEMS switch comprising:
- a first electrode moveable between first and second positions;
- switch terminals selectably connectable based on a position of said first electrode;
- means for moving said moveable electrode from said first position to said second position;
- and
- means for maintaining said moveable electrode in said second position, said means for maintaining being separately controllable from said means for moving.
2 more elements
A method of making a MEMS switch comprising:
- forming at least first and second electrically isolated electrodes between a pair of support posts on a substrate;
- forming switch terminals;
- and
- forming a moveable electrode on said support posts.
1 more element
Dependencies are inferred from the claim text.