Microelectromechanical modulation device and microelectromechanical modulation device array, and image forming apparatus
AssigneeFuji Photo Film Co., Ltd.
InventorsShinya Ogikubo, Hirochika Nakamura
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Abstract
A microelectromechanical modulation device comprising: a movable portion, which is supported to be elastically and bi-directionally displaced and which has a modulation function; and a plurality of driving sources operative to apply a physical action force to said movable portion, wherein when said movable portion is displacement-driven in a first direction, a physical action force for suppressing oscillation of said movable portion is applied to said movable portion in a second direction different from the first direction by said drive sources while said movable portion is transited in the first direction.
Claims13
A microelectromechanical modulation device comprising:
- a movable portion, which is supported to be elastically and bi-directionally displaced and which has a modulation function;
- and
- a plurality of driving sources operative to apply a physical action force to said movable portion,
- wherein when said movable portion is displacement-driven in a first direction, a physical action force for suppressing oscillation of said movable portion is applied to said movable portion in a second direction different from the first direction by said drive sources while said movable portion is transited in the first direction.
Dependencies are inferred from the claim text.