Catoptric imaging systems comprising pellicle and/or aperture-array beam-splitters and non-adaptive and/or adaptive catoptric surfaces

An interferometry system comprising:

• a beam splitting element comprising a first layer containing an array of sagittal slits and a second layer containing an array of tangential slits, wherein each slit of the array of sagittal slits is aligned with a corresponding different slit of the array of tangential slits, wherein the beam splitting element receives a source beam and generates therefrom an array of measurement beams;
• an imaging system that directs the array of measurement beams at an object to produce an array of return measurement beams from the object, that directs the array of return measurement beams onto an image plane, and that delivers a reference beam to the image plane;
• and
• a beam combining element in the image plane that combines the array of return measurement beams with the reference beam to produce an array of interference beams.