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US 2006/0066854 A1Published application
Combined high speed optical profilometer and ellipsometer
AssigneeKLA-Tencor Technologies Corporation
InventorsSteven Meeks, Rusmin Kudinar
Life of this patent
Estimating the term…
Abstract
A system and method for measuring defects, film thickness, contamination, particles and height of a thin film disk or a silicon wafer.
Claims29
A surface scanning method, comprising:
- directing a first radiation beam onto a surface in a first plane of incidence and a second radiation beam onto the surface in a second plane of incidence, the second plane of incidence approximately orthogonal to the first plane of incidence;
- and
- generating a combined signal set from a portion of the radiation reflected from the first radiation beam and a portion of the radiation reflected from the second radiation beam;
- and
- processing the combined signal set to generate a data set representing one or more characteristics of the surface.
2 more elements
A method of inspecting a surface, comprising:
- collecting a first signal set representing one or more optical characteristics of radiation specularly reflected from the surface from a light source disposed in a first plane of incidence;
- collecting a second signal set representing one or more optical characteristics of radiation specularly reflected from the surface from a light source disposed in a second plane of incidence approximately orthogonal to the first plane of incidence;
- combining the first signal set and the second signal set to generate a combined signal set which represents one or more characteristics of the surface;
- and
- processing the combined signal set to generate a data set representing one or more characteristics of the surface.
2 more elements
A system to inspect a surface, comprising:
- an assembly to direct a first radiation beam onto a surface in a first plane of incidence and a second radiation beam onto the surface in a second plane of incidence, the second plane of incidence approximately orthogonal to the first plane of incidence;
- and
- a detector to generate a combined signal set from a portion of the radiation reflected from the first radiation beam and a portion of the radiation reflected from the second radiation beam;
- and
- a processor to process the combined signal set to generate a data set representing one or more characteristics of the surface.
2 more elements
A system for inspecting a surface, comprising:
- a radiation collector to collect a first signal set representing one or more optical characteristics of radiation specularly reflected from the surface from a light source disposed in a first plane of incidence and a second signal set representing one or more optical characteristics of radiation specularly reflected from the surface from a light source disposed in a second plane of incidence approximately orthogonal to the first plane of incidence;
- means for combining the first signal set and the second signal set to generate a combined signal set which represents one or more characteristics of the surface;
- and
- means for processing the combined signal set to generate a data set representing one or more characteristics of the surface.
1 more element
Dependencies are inferred from the claim text.