Optical inspection apparatus and optical inspection method
AssigneeNEC Corporation
InventorsHideyuki Moribe, Motonari Tateno
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Abstract
An optical inspection apparatus for inspecting an inspection target surface by irradiating the inspection target surface with light, includes: a condensing and scanning optical system for condensing light from a light source on the inspection target surface in a minute spot shape and scanning the condensed minute-spot-shaped light onto the inspection target surface; and a phase change information detection apparatus for detecting optical phase change information in an area of the inspection target surface irradiated with the minute-spot-shaped light scanned by the condensing and scanning optical system.
Claims26
An optical inspection apparatus for inspecting an inspection target surface by irradiating the inspection target surface with light, comprising:
- a condensing and scanning optical system for condensing light from a light source on the inspection target surface in a minute spot shape and scanning the condensed minute-spot-shaped light onto the inspection target surface;
- and
- a phase change information detection apparatus for detecting optical phase change information in an area of the inspection target surface irradiated with the minute-spot-shaped light scanned by the condensing and scanning optical system.
An optical inspection method for inspecting an inspection target surface by irradiating the inspection target surface with light, comprising:
- condensing light from a light source on the inspection target surface in a minute spot shape;
- scanning the condensed minute-spot-shaped light onto the inspection target surface;
- and
- detecting optical phase change information in an area of the inspection target surface irradiated with the scanned minute-spot-shaped light.
Dependencies are inferred from the claim text.