Liquid ejection head, method of manufacturing same, and image forming apparatus comprising same

Abstract

The method for manufacturing a liquid ejection head comprising a diaphragm which serves as portions of pressure chambers connected to nozzles through which liquid is ejected, and piezoelectric bodies which deform the diaphragm, the method comprises: an electrical wire forming step of removing at least a part of a silicon substrate, and forming electrical wires for supplying drive signals to drive the piezoelectric bodies, in sections where the silicon substrate has been removed; a piezoelectric body forming step of forming the piezoelectric bodies on sections where the silicon substrate has not been removed at least in the electrical wire forming step; and a diaphragm forming step of forming the diaphragm on a side of the piezoelectric bodies opposite to the silicon substrate.

Dependencies are inferred from the claim text.