Piezoelectric actuator, method for producing the same and ink-jet head
AssigneeBrother Kogyo Kabushiki Kaisha
InventorHiroto Sugahara
Life of this patent
Estimating the term…
Abstract
A method of manufacturing a piezoelectric actuator includes a first step of providing, on an insulating layer, a first electrode which has a recess formed on a surface of the first electrode; a second step of forming a piezoelectric layer on the surface of the first electrode; and a third step of forming a second electrode on a surface of the piezoelectric layer. Since a part of the piezoelectric layer enters into the recess, the piezoelectric layer is constrained by the first electrode. Therefore, the piezoelectric layer hardly exfoliates from the first electrode, and the adhesion between the piezoelectric layer and the first electrode is improved. Consequently, the durability of the piezoelectric actuator is improved.
Claims26
A method of manufacturing piezoelectric actuator comprising:
- a first step of providing, on an insulating layer, a first electrode which has a recess formed on a surface of the first electrode;
- a second step of forming a piezoelectric layer on the surface of the first electrode;
- and
- a third step of forming a second electrode on a surface of the piezoelectric layer.
A piezoelectric actuator comprising:
- an insulating layer;
- a first electrode which has a recess formed on a surface of the first electrode and which is provided on the insulating layer;
- a piezoelectric layer which is formed on the surface of the first electrode;
- and
- a second electrode which is formed on a surface of the piezoelectric layer.
An ink-jet head comprising:
- nozzles which discharge ink;
- a channel unit which has a plurality of pressure chambers communicating with the nozzles, respectively;
- and
- a piezoelectric actuator which selectively changes a volume of the plurality of pressure chambers,
- wherein the piezoelectric actuator includes:
- an insulating layer;
- a plurality of individual electrodes provided on the insulating layer corresponding to the plurality of pressure chambers, respectively, each of the individual electrodes being provided with a recess on a surface thereof;
- a piezoelectric layer provided on surfaces of the plurality of individual electrodes;
- and
- a common electrode provided on the piezoelectric layer.
Dependencies are inferred from the claim text.