Piezoelectric/electrostrictive film type device and method of manufacturing the same

A method of manufacturing a piezoelectric/electrostrictive film type device comprising:

• a thin substrate made of a ceramic;
• and a piezoelectric/electrostrictive operating portion disposed on the substrate and constituted by successively laminating a lower electrode film, a piezoelectric/electrostrictive film containing a large number of crystal particles constituted of a piezoelectric/electrostrictive composition, and an upper electrode film, the method comprising:
• a step of disposing and firing a piezoelectric/electrostrictive composition which satisfies the following conditions (1) in a layer state on the lower electrode film to thereby form the piezoelectric/electrostrictive film:
• conditions (1):
• the piezoelectric/electrostrictive composition prepared using one or more of a plurality of material compounds each containing one or more alkali metal elements selected from the group consisting of lithium (Li), potassium (K), and sodium (Na) and one or more metal elements selected from the group consisting of niobium (Nb), tantalum (Ta), antimony (Sb), and silver (Ag) among contained constituting elements, an amount of the material compound being larger than a theoretical necessary amount calculated from a general formula representing the piezoelectric/electrostrictive composition constituting the crystal particles contained in the piezoelectric/electrostrictive film to be formed.