Inductor energy loss reduction techniques
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsAndrew Yeh, Alex Chang, Sung-Pi Tseng, Chang-Yun Chang, Hao-Yu Chen, Fu-Liang Yang
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Abstract
An inductive device including an inductor coil located over a substrate, at least one electrically insulating layer interposing the inductor coil and the substrate, and a plurality of current interrupters each extending into the substrate, wherein a first aggregate outer boundary of the plurality of current interrupters substantially encompasses a second aggregate outer boundary of the inductor coil.
Claims43
An inductive device, comprising:
- an inductor coil located over a substrate;
- at least one insulating layer interposing the inductor coil and the substrate;
- and
- a plurality of current interrupters each defined in a metal layer interposing the at least one insulating layer and the inductor coil.
An inductive device, comprising:
- an inductor coil located over a substrate;
- at least one electrically insulating layer interposing the inductor coil and the substrate;
- and
- a plurality of current interrupters each extending into the substrate, wherein a first aggregate outer boundary of the plurality of current interrupters substantially encompasses a second aggregate outer boundary of the inductor coil.
A method of manufacturing an inductor device, comprising:
- forming a plurality of trenches in a substrate;
- filling at least partially each of the plurality of trenches;
- forming at least one insulating layer over the substrate, including over the plurality of trenches;
- and
- forming an inductor coil over the insulating layer, the inductor coil having a first aggregate outer boundary substantially encompassed by a second aggregate outer boundary of the plurality of trenches.
An integrated circuit device, comprising:
- a plurality of microelectronic devices each located at least partially in a substrate;
- a plurality of current interrupters each extending into the substrate, the plurality of current interrupters having a first aggregate outer boundary exclusive of ones of the plurality of microelectronic devices;
- and
- an interconnect structure located over the plurality of microelectronic devices and the plurality of current interrupters and including:
- interconnects interconnecting ones of the plurality of microelectronic devices;
- and
- an inductor coil having a second aggregate outer boundary substantially encompassed by the first aggregate outer boundary of the plurality of current interrupters.
Dependencies are inferred from the claim text.