Apparatus and method for manipulating sample temperature for focused ion beam processing
OwnerChad Rue, Steven Herschbein +2inventors
InventorsChad Rue, Steven Herschbein, Carmelo Scrudato, Lawrence Fischer
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Abstract
An apparatus for manipulating the temperature of a sample used in focused ion beam FIB processing includes a base member, a thermoelectric module disposed over the base member, and a sample mounted on a mounting surface of the thermoelectric module. The thermoelectric module is configured so as to reduce the temperature of the sample with respect to an ambient FIB tool temperature.
Claims19
An apparatus for manipulating the temperature of a sample used in focused ion beam FIB processing, comprising:
- a base member;
- a thermoelectric module disposed over the base member;
- and
- a sample mounted on a mounting surface of the thermoelectric module;
- wherein said thermoelectric module is configured so as to reduce the temperature of said sample with respect to an ambient FIB tool temperature.
A method for implementing focused ion beam (FIB) processing, the method comprising:
- mounting a sample on a mounting surface of an FIB tool, said mounting surface including a thermoelectric element;
- controlling said thermoelectric element so as to reduce the temperature of said sample with respect to an ambient FIB tool temperature;
- and
- applying an FIB to said sample.
Dependencies are inferred from the claim text.