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US 2006/0065849 A1Published application
Flash lamp annealing apparatus to generate electromagnetic radiation having selective wavelengths
AssigneeIntel Corporation
InventorsJack Hwang, Stephen Cea, Paul Davids, Karson Knutson
Life of this patent
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Abstract
Flash lamp apparatuses that generate electromagnetic radiation with wavelengths greater than and/or less than a defined range of wavelengths are disclosed.
Claims28
A system, comprising:
- a chamber to receive a substrate;
- and
- a selective light generator including one or more light sources to generate electromagnetic radiation to radiate the substrate, the electromagnetic radiation having wavelengths greater than or less than a defined range of wavelengths, within which the electromagnetic radiation is more efficiently adsorbed or reflected by a portion of the substrate than other portion(s).
A light source, comprising:
- a gas to form electromagnetic radiation generating plasma when energized;
- and
- a jacket that envelops the gas, adapted to filter out electromagnetic radiation having wavelengths within a defined range of wavelengths.
A selective light generator, comprising:
- a light source to generate electromagnetic radiation;
- and
- a filter to filter out electromagnetic radiation having wavelengths within a defined range of wavelengths from the electromagnetic radiation generated by the light source to produce filtered radiation.
A method, comprising:
- providing a substrate;
- and
- exposing the substrate to electromagnetic radiation with wavelengths greater than or less than a defined range of wavelengths within which electromagnetic radiation is more efficiently absorbed or reflected by a portion of the substrate than other portion(s).
Dependencies are inferred from the claim text.