Transmission electron microscopy sample preparation method for electron holography
AssigneeInternational Business Machines Corporation
InventorsThomas Bauer, Steven Boettcher, Anthony Domenicucci, John Gaudiello, Leon Kimball, Jeffrey McMurray, Yun-Yu Wang
Life of this patent
Estimating the term…
Abstract
A method for preparing a transmission electron microscopy (TEM) sample for electron holography includes forming a sacrificial material over an area of interest on the sample, and polishing the sample to a desired thickness, wherein the area of interest is protected from rounding during the polishing. The sacrificial material is removed from the sample following the polishing.
Claims17
A method for preparing a transmission electron microscopy (TEM) sample for electron holography, the method comprising:
- forming a sacrificial material over an area of interest on the sample;
- polishing the sample to a desired thickness, wherein said area of interest is protected from rounding during said polishing;
- and
- removing said sacrificial material from the sample following said polishing.
A method for preparing a transmission electron microscopy (TEM) sample for electron holography, the method comprising:
- forming a sacrificial material over an area of interest on the sample;
- forming a protective layer over said sacrificial material;
- polishing the sample to a desired thickness, wherein said area of interest is protected from rounding during said polishing;
- and
- removing said sacrificial material and said protective layer from the sample following said polishing.
Dependencies are inferred from the claim text.