Substrate processing showerheads

A substrate processing showerhead including:

• a gas inlet leading to a gas reservoir;
• a faceplate fitted between the reservoir and a processing space, the faceplate including a plurality of orifices, and
• a seal fitted between the faceplate and another component of the showerhead, the seal including a sheet having a plurality of orifices, wherein boundaries of at least some of the orifices are substantially surrounded by an upstanding wall formed of deformable material.

A method of manufacturing a seal adapted for use in a substrate processing showerhead, the method including steps of:

• providing a sheet including a plurality of orifices, and
• forming upstanding walls of deformable material that substantially surround boundaries of at least some of the orifices.

A method of assembling a substrate processing showerhead, the method including steps of:

• fitting a sheet between components of the showerhead, the sheet having a plurality of orifices, wherein boundaries of at least some of the orifices are substantially surrounded by an upstanding wall formed of deformable material, and
• forcing at least one of the components onto the sheet such that at least some of the orifice-surrounding walls are deformed, with the deformed material substantially sealing the two components.