Apparatus for repairing circuit pattern and method for manufacturing display apparatus using the same

A pattern repairing apparatus with a substrate on which an electronic circuit pattern is formed, comprising:

• a laser irradiation means which irradiates with a laser beam a region having a shape identical to a standard pattern;
• an inspection data receiving means which receives from an inspection apparatus, an image in proximity to a repair portion and a coordinate of the repair portion;
• a repair portion/pattern detecting means which detects the repair potion and a pattern separately, from said image in proximity to the repair portion;
• an irradiating region setting means which divides an irradiating region into a plurality of regions and decides an irradiation order;
• a pattern displacement detecting means which detects a displacement amount between a pattern on-the-substrate and said laser irradiating region;
• a positioning means which moves at least one of said substrate and said laser irradiating region, based on the displacement amount detected in said pattern displacement detecting means, so that said pattern on-the-substrate conforms to said laser irradiating region;
• a repair success/failure determination means which determines whether a defect repair is successful or not after the laser is irradiated;
• and
• a repairing means which complements a pattern defective portion by supplying a coating material having the same function as that of said electronic circuit pattern.

A pattern repairing apparatus with a substrate on which an electronic circuit pattern is formed, comprising:

• a laser irradiation means which irradiates with a laser beam a region having a shape identical to a standard pattern;
• an inspection data receiving means which receives from an inspection apparatus, an image in proximity to a repair portion and a coordinate of the repair portion;
• a repair portion/pattern detecting means which detects the repair potion and a pattern separately, from said image in proximity to the repair portion;
• an irradiating region setting means which divides an irradiating region into a plurality of regions and decides an irradiation order;
• a pattern displacement detecting means which detects a displacement amount between a pattern on-the-substrate and said laser irradiating region;
• a positioning means which moves at least one of said substrate and said laser irradiating region, based on the displacement amount detected in said pattern displacement detecting means, so that said pattern on-the-substrate conforms to said laser irradiating region;
• a repair success/failure determination means which determines whether a defect repair is successful or not, after the laser is irradiated by said laser irradiating means;
• an inspection means which uses an image sensor to take an image of said substrate, and any one of, or in combination of vertical epi-illumination, oblique light, and transmitted illumination, for irradiating the substrate with an inspection light, so as to expose a pattern defect such as particle existing on said circuit pattern, wire break, and short-circuit, and further to extract said defect and categorize a type thereof by an image processing unit;
• a material coating means which supplies a material having a function equivalent to that of the pattern;
• and
• a coating amount controlling means which measures a coating amount of said coating material by one of, or in combination of the vertical epi-illumination, oblique light, transmitted illumination, polarized illumination, and detection, according to optical properties of said circuit pattern and said coating material, so as to control said material coating means.