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US 2006/0065528 A1Published application
Nanostructured devices for separation and analysis
OwnerGabriel Lopez, Steven Brueck +2inventors
InventorsGabriel Lopez, Steven Brueck, Linnea Ista, Michael O'Brien
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Abstract
Methods for forming an apparatus containing a nanofluidic device with a pattern having nanoscopic features includes producing a regular interference pattern in a substrate using two coherent light beams. In an embodiment, an apparatus includes a nanofluidic device having nanoscopic features in at least two dimensions. In an embodiment, a nanofludic device having nanoscopic features is formed using an ultraviolet source to generate a regular interference pattern.
Claims27
A method comprising:
- producing a regular interference pattern in a substrate using two coherent light beams to form a nanofluidic device having a pattern with nanoscopic features in at least two dimensions.
An apparatus comprising:
- a substrate;
- and
- a nanofluidic device in the substrate, the nanofluidic device having a structure that is nanoscopic in two dimensions.
A system comprising:
- a fluid source;
- a substrate;
- and
- a nanofluidic device in the substrate, the nanofluidic device having a structure that is nanoscopic in two dimensions;
- and
- a means to introduce fluid from the fluid source into the nanofluidic device.
3 more elements
Dependencies are inferred from the claim text.