Method of and apparatus for fabricating nano-sized carbon material
OwnerTsugio Matsuura, Keiji Taniguchiinventors
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OwnerTsugio Matsuura, Keiji Taniguchiinventors
Estimating the term…
It is an object of the invention to provide a method, and an apparatus, capable of fabricating a nano-sized carbon material excellent in quality by use of a three-dimensional discharge apparatus on a mass production basis. There are installed 12 pieces of discharge electrodes, 6 pieces each being horizontally disposed in two tiers, upper tier and lower tier, at a side face part of the discharge vessel. The 6 pieces of the discharge electrodes, in the upper tier and lower tier, respectively, are disposed so as to be angularly shifted by 60 degrees from each other along the horizontal plane, and it is set such that the respective discharge electrodes in the upper tier are disposed so as to be angularly shifted by 30 degrees from the respective discharge electrodes in lower tier as seen from above. ACs from an AC power source, having a phase difference being shifted from each other, are impressed on the 12 pieces of the discharge electrodes, respectively, and when the ACs are impressed on the discharge electrodes, respectively, an arc discharge is caused to occur between the respective discharge electrodes, thereby forming a plasma region in a region surrounded by the respective discharge electrodes. With the use of carbon electrodes for the discharge electrodes, vaporization of carbon from the discharge electrodes takes place owing to high temperature in the plasma region, thereby implementing synthesis of a high-impurity nano-sized carbon material.
A method of fabricating a nano-sized carbon material comprising the steps of preparing not less than three pieces of discharge electrodes disposed in two dimensions or three dimensions, impressing acs with a phase difference shifted from each other on the not less than three pieces of the discharge electrodes, respectively, in an insert gas atmosphere, thereby causing arc discharges to occur, and producing the nano-sized carbon material from a carbon raw material by use of a plasma region formed by the arc discharges.
An apparatus for fabricating a nano-sized carbon material comprising a discharge vessel where not less than three pieces of carbon discharge electrodes are disposed in two dimensions or three dimensions, a gas feeder for feeding an inert gas into the discharge vessel, and an AC power source for impressing ACs with a phase difference shifted from each other on the carbon discharge electrodes, respectively, thereby causing an arc discharge to occur between the respective carbon discharge electrodes.
An apparatus for fabricating a nano-sized carbon material comprising a discharge vessel where not less than three pieces of discharge electrodes are disposed in two dimensions or three dimensions, a gas feeder for feeding an inert gas containing a raw material gas into the discharge vessel, and an AC power source for impressing ACs with a phase difference shifted from each other on the discharge electrodes, respectively, thereby causing an arc discharge to occur between the respective discharge electrodes.
Dependencies are inferred from the claim text.