Method and apparatus for manufacturing plate-like structure
AssigneeKabushiki Kaisha Toshiba
InventorsRyoichi Takahashi, Masatoshi Sakurai
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Abstract
A method for manufacturing a plate-like structure, the method including a step of transferring concave and convex patterns on a master to a surface of a transferred substrate by sandwiching the master provided with the concave and convex patterns and the transferred substrate, between a press surface of a hollow cylindrical upper and a press surface of a lower mold, and pressurizing central parts of the upper and lower molds to apply pressure to the master and the transferred substrate, wherein a compressive load imposed on inner peripheral portions of the upper and lower molds is blocked and distributed toward outer peripheries of the upper and lower molds.
Claims16
A method for manufacturing a plate-like structure, the method comprising a step of transferring concave and convex patterns on a master to a surface of a transferred substrate by sandwiching the master provided with the concave and convex patterns and the transferred substrate, between a press surface of a hollow cylindrical upper mold and a press surface of a hollow cylindrical lower mold, and pressurizing central parts of the upper and lower molds to apply pressure to the master and the transferred substrate,
- wherein a compressive load imposed on inner peripheral portions of the upper and lower molds is blocked and distributed toward outer peripheries of the upper and lower molds.
A method for manufacturing a plate-like structure, the method comprising a step of transferring concave and convex patterns on a master to a surface of a transferred substrate by sandwiching the master provided with the concave and convex patterns and the transferred substrate, between a press surface of an upper mold and a press surface of a lower mold, and applying pressure to the master and the transferred substrate,
- wherein a compressive load imposed on outer peripheral portions of the upper and lower molds is distributed toward central axes of the upper and lower molds.
An apparatus which manufactures a plate-like structure, the apparatus transferring concave and convex patterns on a master to a surface of a transferred substrate by sandwiching the master provided with the concave and convex patterns and the transferred substrate, between a press surface of a hollow cylindrical upper mold and a press surface of a hollow cylindrical lower mold, and applying pressure to the master and the transferred substrate,
- wherein the apparatus comprises grooves formed in inner peripheral surfaces of the upper and lower molds to block a compressive load concentrating at inner peripheral portions of the upper and lower molds to distribute the compressive load toward outer peripheries of the upper and lower molds.
An apparatus which manufactures a plate-like structure, the apparatus transferring concave and convex patterns on a master to a surface of a transferred substrate by sandwiching the master provided with the concave and convex patterns and the transferred substrate, between a press surface of an upper mold and a press surface of a lower mold, and applying pressure to the master and the transferred substrate,
- wherein the apparatus comprises grooves formed in outer peripheral surfaces of the upper and lower molds to distribute a compressive load concentrating at outer peripheral portions of the upper and lower molds toward central axes of the upper and lower molds.
Dependencies are inferred from the claim text.