Method and apparatus for separation of moisture from fluids
AssigneeThe BOC Group, Inc.
InventorRavi Jain
Life of this patent
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Abstract
Apparatus and methods useful for removal or reduction of moisture from fluids are described. In one embodiment the apparatus comprises a moisture separation unit comprising a thermally regenerable moisture adsorption material having feed and waste sides, and means for regenerating the thermally regenerable moisture adsorption material. The feed fluid contacts the feed side, while a dry, preferably heated purge gas flows past the waste side. The thermally regenerable moisture adsorption material is regenerated by contacting with the heated dry purge gas. The apparatus and methods are particularly useful in supplying dehydrated electronic specialty gases to semiconductor tools.
Claims59
An apparatus useful for separation of moisture from a feed fluid, the apparatus comprising:
- a feed fluid source;
- a dry purge gas source;
- and
- at least one moisture separation unit comprising
- a feed fluid inlet fluidly connected to the feed fluid source,
- a product outlet,
- a dry purge gas inlet fluidly connected to the dry purge gas source,
- a thermally regenerated moisture adsorption material having a feed side and a waste side,
- a first passage for allowing the feed fluid to contact the feed side of the adsorption material, and
- a second passage for allowing the dry purge gas to contact and flow past the waste side of the adsorption material.
A moisture removal apparatus comprising:
- a feed fluid source;
- a dry purge gas source;
- a first moisture separation unit in fluid communication with the feed fluid source, the first moisture separation unit comprising
- a feed fluid inlet,
- an intermediate product fluid outlet,
- a purge gas inlet,
- a moisture adsorption material having a feed side and a waste side,
- a first passage for allowing the feed fluid to contact the feed side of the adsorption material, and
- a second passage for allowing the purge gas to contact and flow past the waste side of the adsorption material;
- and
- at least one second moisture separation unit comprising
- an intermediate product fluid inlet in fluid communication with the intermediate product fluid outlet of the first moisture separation unit,
- a product outler,
- a dry purge gas inlet,
- a purge gas outlet in fluid communication with the purge gas inlet of the first moisture separation unit.
A method of removing moisture from a feed fluid, the method comprising:
- providing at least one moisture separation unit including a feed fluid inlet, a product outlet, a dry purge gas inlet, a thermally regenerated moisture adsorption material having a feed side and a waste side, a first passage on the feed side of the adsorption material, and a second passage on the waste side of the adsorption material;
- flowing the feed fluid into the first passage of the moisture separation unit so that the feed fluid contacts the feed side of the adsorption material;
- flowing dry purge gas into the second passage of the moisture separation unit so that the dry purge gas contacts the waste side of the adsorption material so that moisture is transferred to the dry purge gas;
- stopping the flow of the feed fluid after a predetermined time period or after the adsorption material is substantially loaded with moisture;
- heating the dry purge gas prior to flowing the dry purge gas into the second passage of the moisture separation unit;
- and
- flowing the heated dry purge gas past the waste side of the adsorption material to regenerate the adsorption material.
A method of making a gaseous product having a moisture content of no more than 100 ppm, the method comprising:
- providing a first moisture separation unit having a first moisture adsorption material including a feed side and a waste side;
- contacting a feed fluid having a moisture content of at least 1000 ppm with the feed side of the first moisture adsorption material to produce an intermediate product fluid having a reduced moisture content relative to the feed fluid;
- contacting the waste side of the first moisture adsorption material with a secondary purge gas to produce a wet purge gas having a higher moisture content than the secondary purge gas;
- providing at least one second moisture separation unit having a second moisture adsorption material including a feed side and a waste side;
- contacting the intermediate product fluid with the feed side of the second moisture adsorption material to produce a product fluid having a moisture content less than 100 ppm;
- and
- thermally regenerating the second moisture adsorption material by flowing a dry purge gas past the waste side of the second moisture adsorption material to produce the secondary purge gas having a higher moisture content than the dry purge gas.
Dependencies are inferred from the claim text.