Capacitance type physical quantity sensor having sensor chip and circuit chip

A capacitance type physical quantity sensor comprising:

• a sensor chip for detecting a physical quantity;
• and
• a circuit chip for processing a signal outputted from the sensor chip, wherein
• the sensor chip includes:
• a support substrate;
• a semiconductor layer disposed on one side of the substrate;
• a movable electrode disposed in the semiconductor layer and displaceable in a direction parallel to the substrate in accordance with the physical quantity;
• and
• a fixed electrode disposed in the semiconductor layer and facing the movable electrode,
• the sensor chip is capable of detecting the physical quantity on the basis of a capacitance change of a capacitor provided between the movable electrode and the fixed electrode,
• the capacitance change is provided by a displacement of the movable electrode in accordance with the physical quantity,
• the sensor chip is stacked on the circuit chip in such a manner that the movable electrode and the fixed electrode face the circuit chip,
• the sensor chip is electrically connected to the circuit chip,
• the movable electrode has a thickness in a stacking direction of the sensor chip,
• the sensor chip has a first distance between the movable electrode and the circuit chip and a second distance between the movable electrode and the support substrate, and
• the thickness of the movable electrode is larger than the first distance and the second distance.