Method and system for detecting leak in electronic devices

A method of detecting a leak in an electronic device, comprising:

• maintaining an electronic device in a filling chamber containing a test gas, the electronic device is substantially free of a gas;
• transferring the electronic device into an inspection chamber substantially free of the test gas;
• and
• detecting the test gas existing in the inspection chamber while maintaining the electronic device in the inspection chamber.

A method of detecting a leak in an electronic device, comprising:

• providing an electronic device in a chamber;
• supplying a test gas to the chamber to create a test gas environment within the chamber;
• flushing the test gas out of the chamber;
• supplying a non-test gas to the chamber to create a non-test gas environment within the chamber;
• and
• detecting the test gas existing in the non-test gas environment.

An electronic device inspected by a method of detecting a leak, the method comprising:

• placing the electronic device in a test gas environment comprising a test gas, wherein the electronic device is substantially free of the test gas;
• placing the electronic device in a non-test gas environment substantially free of the test gas;
• and
• detecting the test gas while the electronic device is placed in the non-test gas environment.

A system for testing an electronic device for leakage, comprising:

• a filling chamber connected to a supply of a test gas so as to create a test gas environment therein;
• a inspection chamber connected to a supply of a non-test gas so as to create a non-test gas environment therein, wherein the inspection chamber not connected to a supply of the test gas;
• and
• a test gas sensor connected the inspection chamber and configured to detect the test gas existing in the inspection chamber or flowing out of the inspection chamber.

A system for testing an electronic device for leakage, comprising:

• a test chamber;
• a supply of a test gas connected to the test chamber and configured to supply the test gas into the test chamber;
• a supply of a non-test gas connected to the chamber and configured to supply the non-test gas into the test chamber;
• and
• a test gas sensor connected to the test chamber and configured to detect the test gas existing in the test chamber or flowing out of the inspection chamber.

A system for testing an electronic device for leakage, comprising:

• means for providing a test gas environment, which comprises a test gas;
• means for creating a non-test gas environment that is substantially free of the test gas;
• and
• means for detecting the test gas when a device under test is in the non-test gas environment.