Electrostatic motor and method of manufacturing the same

A method of manufacturing an electrostatic motor;

• said electrostatic motor including a stationary member having a plurality of electrodes disposed on one surface of an insulating substrate at regular intervals, a movable member having a plurality of electrodes disposed on one surface of an insulating substrate at regular intervals identical to the intervals of the electrodes of the stationary member, a first support member for supporting the stationary member in a fixed manner, and a second support member for supporting the movable member in a manner movable relative to the stationary member;
• said method comprising:
• forming a plurality of electrodes on one surface of an insulating substrate and, simultaneously therewith, locally forming a light interrupting mark having a predetermined contour on said surface independently of said plurality of electrodes, to produce at least one of said stationary member and said movable member;
• irradiating a local region of said insulating substrate adjacent to said light interrupting mark formed on said surface of said insulating substrate with a light, and thereby removing said local region along an edge of said light interrupting mark without substantially damaging said light interrupting mark, to provide a mounting recess in at least one of said stationary member and said movable member;
• and
• mounting at least one of said stationary member and said movable member onto at least one of said first support member and said second support member corresponding thereto, by using said mounting recess provided in at least one of said stationary member and said movable member.