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US 2006/0064440 A1Published application
Data sharing and networking system for integrated remote tool access, data collection and control
OwnerStuart Perryinventor
Life of this patent
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Abstract
A data brokering system for semiconductor wafer data is presented that comprises: a FAB having at least one automated semiconductor wafer manufacturing tool; a plurality of OEMs, coupled to the FAB via a secure service net; means for providing data about a semiconductor wafer manufactured by the tool to one of the OEMs without revealing information about the tool; and means for collecting fees based on characteristics of the provided data.
Claims8
A data-sharing system comprising:
- one or more automated manufacturing tools capable of supplying data regarding the operation and status of said tools as well as various parameters regarding the object being manufactured by said tool;
- one or more filters, corresponding to said one or more tools, operative on said data supplied by said tool to separate tool-specific data from data regarding said manufactured object;
- a database, for storing said data regarding said manufactured object;
- a facility for allowing the retrieval of said data regarding said manufactured object from said database;
- and
- a facility for imposing a fee for said retrieval of said data, said fee being based on the content of said data.
3 more elements
Dependencies are inferred from the claim text.