Probe microscope system suitable for observing sample of long body

A microscope system including a sample base constituted by a structure in which a section in a longitudinal direction of a base main body for mounting a sample board is brought into contact with one end portion of a holder in a channel-like shape, the other end thereof is press-held by a holding plate via a spring fixed to the other end portion of the holder, the base main body and the holder are constituted by a same material having a low linear expansion coefficient, and a displacement sensor is arranged at the other end portion of the holder, and having a function of determining that a temperature of a sample is uniform and stable by the sensor.

A scanning method in a microscope system, wherein a probe scans in a direction of traversing a sample of a long body (Y line), detects to record a position of the sample of the long body on the Y line, successively moved by one unit in an X direction, executes a scanning controlling a start point position and an end point position of the Y line such that the position of the sample of the long body measured at a preceding time is disposed at a center on the Y line and repeats the scanning thereafter to thereby firmly catch the sample of the long body by the probe.

A scanning method of a microscope system, wherein a probe scans in a direction of traversing a sample of a long body (Y line), detects to record a position of traversing the sample of the long body, thereafter, the probe is moved in an X direction by a predetermined distance and scans the Y line again by a large amount, detects to record a position of traversing the sample of the long body on the Y line, connects the two detected positions by a linear line and executes scanning by determining a number of pieces of scanning lines in parallel with the line in consideration of an amount of bending the sample of the long body.

A scanning method of a microscope system, wherein a probe scans in a direction of traversing a sample of a long body (Y line), finishes to scan the Y line when a board of a predetermined length is detected after traversing to detect the sample of the long body, the probe is moved by a predetermined distance in an X direction and scans the Y line from a reverse direction, finishes to scan the Y line when the board of the predetermined length is detected after traversing to detect the sample of the long body on the Y line, the probe is further moved by the predetermined distance in the X direction and scans the Y line from a regular direction and repeats similar scanning thereafter.

A scanning method of a microscope system, wherein a probe scans in a direction of traversing a sample of a long body (Y line), detects to record a position of traversing the sample of the long body, thereafter, the probe is moved by a predetermined distance in a number of directions centering on the position, a direction in which a stylus is maintained at a high position for a longest period of time is ascribed, the probe is displaced by a predetermined amount in the direction, the probe is moved again by the predetermined distance in the number of directions centering on the position, the position in which the stylus is maintained at the high position for a longest period of time is ascribed, the probe is displaced by the predetermined amount in the direction and repeats to scan similarly thereafter.

A scanning method of a microscope system, wherein a probe scans in a direction of traversing a sample of a long body (Y line), detects to record a position of traversing the sample of the long body, thereafter, scans a circle having a predetermined radius centering on the position, when the stylus detects a highest position, the probe is moved to the position, scans again the circle having the predetermined radius centering on the position, when the stylus detects the highest position, the probe is moved to the position again and repeats similar scanning thereafter.

A scanning method of a microscope system, wherein a probe scans in a direction of traversing a sample of a long body (Y line), detects to record a position of traversing the sample of the long body, thereafter, executes X scanning while being vibrated by a predetermined width centering on the position, a position of the stylus is controlled by a down-hill control such that the stylus detects a highest position, and the stylus scans to track on the sample of the long body.

An image synthesizing method of a microscope system, wherein a continuous SPM image is provided while feeding a frame in an X direction by a sample stage, the frame is fed such that an overlapped portion of a sample of a long body is produced between contiguous images, pieces of information of a sample of a long one piece long member are successively connected by overlapping the portion.