System and method for semiconductor manufacturing automation
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorYuan-Li Liao
Life of this patent
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Abstract
The present disclosure provides a method and system for semiconductor manufacturing automation. In one example, a method for semiconductor manufacturing automation comprises providing an identification table; defining a scheduled sequence; recording a performed sequence; and issuing a warning, if the scheduled sequence does not match the performed sequence.
Claims20
A method for semiconductor manufacturing automation, comprising:
- providing an identification table;
- defining a scheduled sequence;
- recording a performed sequence;
- and
- issuing a warning, if the scheduled sequence does not match the performed sequence.
A computer readable medium comprising a plurality of instructions relating to semiconductor manufacturing automation for execution by at least one computer processor, wherein the instructions are for:
- providing an identification table;
- defining a scheduled sequence;
- recording a performed sequence;
- and
- confirming a successful performance of the scheduled sequence, if the scheduled sequence is identical to the performed sequence.
The computer readable medium of 11 further comprising providing a warning, if the scheduled sequence does not match the performed sequence.
The computer readable medium of 11 wherein the defining comprises supplying one or more recipes for the scheduled sequence.
The computer readable medium of 11 wherein the identification table comprises one or more recipes and their corresponding identification codes.
The computer readable medium of 11 wherein the recording comprises verifying that a performed recipe exists in the identification table.
The computer readable medium of 11 wherein the recording comprises inserting a corresponding identification code of a performed recipe into a verification table.
A method for semiconductor manufacturing automation, comprising:
- providing an identification table for one or more recipes;
- defining a scheduled sequence for a lot wherein the scheduled sequence includes one or more recipes, and not all of the one or more recipes are identical;
- recording a performed sequence in a verification table;
- and
- issuing a warning, if the performed sequence does not match the scheduled sequence.
The method of claim 19 further comprising confirming a successful performance of the scheduled sequence, if the performed sequence is identical to the scheduled sequence.
Dependencies are inferred from the claim text.