System and method for optimizing data acquisition of plasma using a feedback control module

A computer readable medium including a program for carrying at least one sequence of instructions for optimally acquiring plasma data, wherein execution of the at least one sequence of instructions by the at least one processor causes the at least one processor to perform the steps of:

• selecting an operational condition for a plasma generation system;
• operating the plasma generation system under the operational condition selected in said step of selecting;
• determining whether a stable plasma is established using a sensing device;
• and
• if a stable plasma is established, then
• acquiring data, and
• storing the acquired data.

A system for acquiring plasma data, the system comprising:

• means for selecting an operational condition for a plasma generation system;
• means for operating the plasma generation system under the operational condition;
• means for determining whether a stable plasma is established using a sensing device;
• and
• means for acquiring data and storing the acquired data.

A computer including a processor for running a computer-readable program code in a memory, said computer comprising:

• a recipe file having at least one recipe that specifies at least one operational condition of a plasma generating system;
• a feedback control manager structured and arranged to control said plasma generating system under the at least one operational condition, said feedback control manager comprising:
• a recipe interpreter for interpreting the at least one recipe;
• and
• a recipe sequencer for sequencing the recipe into at least one command to control said plasma generating system;
• a data acquisition manager configured to acquire data if said plasma generating system generates a stable plasma under the at least one operational condition;
• and
• an open database connectivity configured to store the data.

A system for acquiring plasma data, comprising:

• a microwave generator for generating microwaves;
• a power supply connected to said microwave generator for providing power thereto;
• a microwave cavity having a wall forming a portion of a gas flow passage;
• a waveguide operatively connected to said microwave cavity for transmitting microwaves thereto;
• a coupler operatively connected to said waveguides;
• a power meter, connected to the coupler, for measuring microwave fluxes;
• an isolator, operatively connected to the waveguide, for dissipating microwaves reflected from said microwave cavity;
• a gas flow control mechanism coupled to the gas flow passage of said microwave cavity for controlling a gas flow rate;
• a nozzle operatively coupled to the gas flow passage of said microwave cavity and configured to generate plasma from a gas flow and microwaves received from said microwave cavity;
• a sensing device configured to respond to a characteristic quantity of the plasma;
• at least one measurement device configured to acquire data;
• and
• a feedback control module connected to said power supply, said power meter, said sensing device, said at least one measurement device and said gas flow control, said feedback control module being configured to control said power supply, said at least one measurement device and said gas flow control and to receive at least one signal from said power meter and said sensing device.

A feedback control module for acquiring data of a plasma generated by a gas flow heated by microwaves, comprising:

• a first field Input/Output coupled to a power control configured to control microwave generation;
• a universal serial bus/general-purpose interface bus (UBS/GPIB) converter coupled to a power meter that is configured to measure fluxes of the microwaves;
• a second field Input/Output coupled to a sensing device that is configured to generate a signal in response to a characteristic quantity of plasma;
• a third field Input/Output coupled to a measurement device that is configured to acquire plasma data if a stable plasma is established;
• a fourth field Input/Output coupled to a gas flow control;
• and
• a computer having an interface coupled to said first, second, third and fourth field Input/Outputs and said USB/GPIB converter, and said interface comprising a plurality of interface components.

A method for acquiring plasma data, comprising the steps of:

• (a) selecting an operational condition for a plasma generation system;
• (b) operating the plasma generation system under the operational condition selected in said step of selecting;
• and
• (c) determining whether a stable plasma is established using a sensing device;
• and
• (d) evaluating whether a stable plasma is established in said step of determining, wherein in case of a successful establishment, further comprising the steps of acquiring data and storing the data obtained in said step of acquiring.