Method of and apparatus for magnetic-abrasive machining of wafers
AssigneeMagnetic Abrasive Technologies, Inc.
InventorGennady Kremen
Life of this patent
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Abstract
A method of magnetic-abrasive machining of parts has the steps of supporting a part, generating a magnetic field by magnetic means located at one side of the part, placing a magnetic-abrasive powder on a surface located at another, opposite side of the part, so that the magnetic-abrasive powder is attracted by the magnetic means and pressed to the surface of the part, and providing a. relative movement of the parts and the magnetic abrasive powder retained by the magnetic means relative to one another so as to machine the surface of the part which is therefore open for observation and supply of the magnetic abrasive powder; and an apparatus is proposed as well.
Claims16
A method of magnetic-abrasive machining of parts, comprising the steps of supporting a part;
- generating a magnetic field by magnetic means located at one side of the part;
- placing a magnetic-abrasive powder on a surface located at another, opposite side of the part, so that the magnetic-abrasive powder is attracted by said magnetic means and pressed to the surface of the part, and providing a relative movement of the parts and the magnetic abrasive powder retained by said magnetic means relative to one another so as to machine the surface of the part which is therefore open for observation and supply of the magnetic abrasive powder.
An apparatus for magnetic-abrasive machining of parts, comprising means for supporting a part;
- magnetic means for generating a magnetic field and located at one side of the part;
- means for placing a magnetic-abrasive powder on a surface located at another, opposite side of the part, so that the magnetic-abrasive powder is attracted by said magnetic means and pressed to the surface of the part;
- and providing a relative movement of the parts and the magnetic abrasive powder retained by said magnetic means relative to one another so as to machine the surface the surface of the part which is therefore open for observation and supply of the magnetic abrasive powder.
Dependencies are inferred from the claim text.