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AssigneeNikon Corporation
InventorsShigeto Izumi, Hiroshi Arai
Estimating the term…
The vacuum suction holding apparatus of the present invention has a vacuum duct which is disposed inside a polishing head, with one end of this vacuum duct being opened in the attachment surface and the other end thereof being connected to a vacuum source. A polishing body is held by suction on the attachment surface of the polishing head by sucking air through the vacuum duct. The apparatus further has an orifice which is disposed in the vacuum duct, a first pressure sensor and a second pressure sensor which detect the pressure inside the vacuum duct at positions before and after the orifice, and a judgment device which judges whether or not the polishing body is held by suction on the polishing head on the basis of the pressure difference before and after the orifice detected by these two pressure sensors.
A holding apparatus which has a holding member having an attachment surface for a polishing body, a vacuum source, and a vacuum duct which is disposed inside the holding member, with one end of this vacuum duct being opened in the attachment surface and the other end thereof being connected to the vacuum source, and which causes the polishing body to be held by suction on the attachment surface by sucking air through the vacuum duct, the holding apparatus comprising:
A holding method which causes a polishing body to be held by suction on an attachment surface formed on a holding member by sucking air through a vacuum duct formed inside the holding member, the holding method comprising:
Dependencies are inferred from the claim text.