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AssigneeSamsung Electronics Co., Ltd.
InventorsHyeung-Yeul Kim, Sung-Hwan Kim
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A system and method adapted to detect a malfunction related to a pad conditioner in a polishing apparatus are disclosed. The pad conditioner includes a conditioning pad seated on a conditioner head and a drive motor rotating the conditioner head. The system also comprises a current sensor connected to the drive motor, adapted to detect electrical current drawn by the drive motor, and provide a corresponding current value, a Personal Computer (PC) receiving the current value, adapted to compare the received current value to first and second reference values, and generate a drive indication signal in response to the comparison, and a main controller receiving the drive indication signal and adapted to generate an interlock signal halting operation of the polishing apparatus in response to the drive indication signal.
A system adapted to detect a malfunction related to a pad conditioner in a polishing apparatus, wherein the pad conditioner comprises a conditioning pad seated on a conditioner head, and a drive motor rotating the conditioner head, wherein the system comprises:
A method of detecting a malfunction related to a pad conditioner in a polishing apparatus, wherein the pad conditioner comprises a conditioning pad seated on a conditioner head, and a drive motor rotating the conditioner head, wherein the method comprises:
A method of detecting a malfunction related to a pad conditioner in a polishing apparatus, wherein the pad conditioner comprises a conditioning pad seated on a conditioner head, and a drive motor rotating the conditioner head, wherein the method comprises:
Dependencies are inferred from the claim text.