Active matrix substrate and manufacturing method thereof, electric optical device and electronic device

A method of manufacturing an active matrix substrate having a driver circuit including thin film transistors that are arranged corresponding to respective cross points of a plurality of operation line films and a plurality of signal line films arranged in matrix, comprising:

• a substrate wiring formation step that forms, on a first substrate, laminated wiring including a feed line film for supplying the driver circuit with current, a signal line film for supplying the driver circuit with a level signal for setting magnitude of the current, and an operation line film for supplying the driver circuit with an operation instruction signal for instructing whether to supply the current;
• a circuit thin film formation step that transferably forms a circuit thin film carrying the driver circuit on a second substrate;
• and
• a circuit thin film transfer step that transfers the circuit thin film from the second substrate to the first substrate and connects the circuit thin film with the laminated wiring:
• wherein the substrate wiring formation step forms the laminated wiring so that the feed line film constitutes an upper layer among the feed line film, the signal line film, and the operation line film.