Plate-based microelectromechanical switch having a three-fold relative arrangement of contact structures and support arms

A microelectromechanical system (MEMS) switch, comprising:

• a fixed electrode;
• a moveable electrode spaced apart from the fixed electrode;
• a plurality of contact structures having portions extending into a space between the fixed electrode and the moveable electrode;
• and
• a plurality of support arms extending from the moveable electrode, wherein the relative arrangement of the plurality of support arms and the plurality of contact structures are congruent among three regions of the MEMS switch which collectively comprise the entirety of the fixed electrode and the entirety of the moveable electrode.

A microelectromechanical system (MEMS) switch, comprising:

• a moveable electrode;
• three support arms extending from the moveable electrode, wherein the three support arms are uniformly spaced about the periphery of the moveable electrode;
• and
• a plurality of contact structures arranged adjacent and relative to three regions of the moveable electrode defined by boundaries extending from each of the three support arms to a central region of the moveable electrode, wherein the arrangement of one or more of the contact structures adjacent to one of the three regions is not congruent with the arrangement of one or more of the contact structures adjacent to the other two regions.

A microelectromechanical system (MEMS) switch, comprising:

• a fixed electrode formed upon a substrate;
• a moveable electrode spaced above the fixed electrode;
• and
• a single set of support arms extending from the moveable electrode to different support vias coupled to the substrate, wherein the single set of support arms consists of a multiple of three support arms.

A switch array, comprising:

• a plurality of MEMS switches, wherein at least one of the plurality of MEMS switches comprises:
• a fixed electrode formed upon a substrate;
• a moveable electrode spaced above the fixed electrode;
• and
• a single set of support arms extending from the moveable electrode to different support vias coupled to the substrate, wherein the single set of support arms consists of a multiple of three support arms;
• a signal input pad coupled to each of the plurality of MEMS switches;
• and
• a set of signal output pads each coupled to a different MEMS switch of the plurality of MEMS switches.