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US 2006/0050353 A1Published application
Micromirrors and hinge structures for micromirror arrays in projection displays
AssigneeReflectivity, INC
InventorsAndrew Huibers, Satyadev Patel
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Abstract
The micromirror of the present invention comprises a mirror plate having thereon a cavity allowing deformation of a hinge attached to the mirror plate and deflection of the mirror plate in operation.
Claims35
A spatial light modulator, comprising:
- an array of micromirrors, each micromirror comprising a deformable hinge and a deflectable reflective mirror plate attached to the deformable hinge, wherein the mirror plate comprises a cavity in a surface of the mirror plate;
- wherein a portion of the deformable hinge is disposed within the cavity at least during a rotation of the mirror plate.
(canceled)
A spatial light modulator, comprising:
- an array of micromirrors, each of which comprises a deformable hinge;
- and deflectable mirror plate attached to the deformable hinge, wherein the mirror plate has a reflective surface that is substantially that without a dent, and another surface having a cavity.
Dependencies are inferred from the claim text.