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US 2006/0050280 A1Published application
Utilizing an integrated plasmon detector to measure a metal deposit roughness on a semiconductor surface
AssigneeCalifornia Institute of Technology
InventorsDavid Wei, Axel Scherer
Life of this patent
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Abstract
A method for monitoring the surface roughness of a metal, comprises impinging a laser beam onto the surface of a metal layer to induce the formation of a plasmon therein, and monitoring a current of decay electrons emitted by the plasmon.
Claims9
A method for monitoring the surface roughness of a metal, comprising:
- impinging a laser beam onto the surface of a metal layer to induce the formation of a plasmon therein;
- and
- monitoring a current of decay electrons emitted by the plasmon.
Dependencies are inferred from the claim text.