US 2006/0050267 A1Published application

Substrate inspection method and apparatus

AssigneeOMRON Corporation

InventorsKiyoshi Murakami, Yasunori Asano, Takashi Kinoshita, Teruhisa Yotsuya

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Abstract

Preparation steps are taken before a substrate with components is inspected and a whole image of a standard substrate is prepared preliminarily and inspection areas are determined for target portions to be inspected on this whole image. At the time of the inspection, a camera is positioned corresponding to a target portion to obtain a target image and an area corresponding to the target image is extracted from the whole image and displacement values of this area are calculated relative to the target image. The setting position of the inspection area is corrected by the calculated displacement values and an inspection area is set on the target image based on the corrected coordinates.

Claims9

Dependent claims

A method of inspecting a plurality of target portions on a substrate having components mounted thereon by using an image taken of said substrate by image taking means, said method comprising preparation steps and inspection steps, said preparation steps including:

step A of obtaining a standard image that is obtainable when the field of vision of said image taking means matches a specified area on a substrate;
step B of obtaining a positional relationship between said image taking means and said substrate that is necessary for position-matching said image taking means with said specified area;
step C of setting an inspection area at a target portion on said standard image;
and
step D of registering by correlating said standard image, the positional relationship obtained in said step B between said image taking means and said substrate and the positional relationship set in said step C between said inspection area and said standard image;
said inspection steps including:
first step of creating a target image for inspection by position-matching said image taking means to a target substrate for inspection based on the positional relationship registered in said step D between said image taking means and said substrate;
second step of matching said target image created in said first step with said standard image registered in said step D and thereby detecting displacement values of said target image with respect to said standard image;
third step of correcting the positional relationship registered in said step D between said inspection area and said standard image by said displacement values detected in said second step and setting an inspection area on said target image based on said corrected positional relationship;
and
fourth step of carrying out an image processing for said inspection steps by using image data in said inspection area set in said third step.

8 more elements

An apparatus for inspecting a plurality of target portions on a substrate having components mounted thereon by using an image taken of said substrate, said apparatus comprising:

a substrate stage for supporting a target substrate to be inspected with said target portions facing upward;
an image taking means for photographing a substrate supported by said substrate stage from above;
moving means for changing relative horizontal position between said image taking means and said substrate stage;
a memory that registers a standard image obtained when the field of vision of said image taking means is matched to a specified area on said target substrate, positional relationship between said image taking means and said substrate when said standard image is obtained and positional relationship of inspection area with respect to said standard image;
position adjusting means for controlling motion of said moving means such that the positional relationship between said image taking means and said substrate is adjusted to be the same as the positional relationship registered in said memory;
image creating means for creating a target image to be processed by operating said image taking means after adjustment is made by said position adjusting means;
displacement detecting means for detecting displacement values of the target image with respect to said standard image by matching said target image with said standard image;
area setting means for correcting the positional relationship between said inspection area and said standard image registered in said memory by said displacement values detected by said displacement detecting means and setting an inspection area on said target image based on the corrected positional relationship;
and
image processing means for carrying out image processing for inspection by using image data in said inspection area set by said area setting means.

7 more elements

Dependencies are inferred from the claim text.