Linear motor and linear moving stage device
AssigneeToshiba Kikai Kabushiki Kaisha
InventorTsuyoshi Moriyama
Life of this patent
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Abstract
A linear motor for giving thrust to a movable unit capable of linearly moving freely in one direction with respect to a stator, comprising a plurality of permanent magnets arranged on the base side by lining up a positive pole and a negative pole in the one direction; and a plurality of flat shaped coils arranged along the arrangement direction of permanent magnets and fixed as armatures to said movable unit side so as to face the permanent magnets by leaving an electromagnetic gap; wherein a coil fixed surface on the stage side is provided a recessed portion for defining an air gap between the coil fixed surface and said coils.
Claims19
A linear motor for giving thrust to a movable unit capable of linearly moving freely in one direction with respect to a stator, comprising:
- a plurality of permanent magnets arranged on the stator side by lining up a positive pole and a negative pole in said one direction;
- and
- a plurality of flat shaped coils arranged along the arrangement direction of permanent magnets and fixed as armatures to said movable unit side so as to face the permanent magnets by leaving an electromagnetic gap;
- wherein a coil fixed surface on the movable element side is provided with a recessed portion for defining an air gap between the coil fixed surface and said coils.
A linear moving stage device comprising a base, a stage built to be able to linearly move freely in one direction with respect to the base, and a linear motor for giving thrust in said one direction to the stage,
- said linear motor comprising:
- a plurality of permanent magnet arranged on the base by lining up a positive pole and a negative pole in said one direction, and
- a plurality of flat shaped coils arranged along the arrangement direction of permanent magnets and fixed as armatures to said stage so as to face the permanent magnets by leaving an electromagnetic gap;
- wherein a coil fixed surface on the stage side is provided with a recessed portion for defining an air gap between the coil fixed surface and said coils.
Dependencies are inferred from the claim text.