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US 2006/0049697 A1Published application
Split coil linear motor for z force
AssigneeNikon Corporation
InventorMichael Binnard
Life of this patent
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Abstract
Methods and apparatus for enabling a coil to be used to provide a net force along more than one axis are disclosed. According to one aspect of the present invention, an actuator includes a magnet assembly and a coil assembly. The coil assembly moves at least partially within the magnet arrangement, and includes a top coil half and a bottom coil half. The top coil half and the bottom coil half are independently controllable such that a first current applied to the top coil half may be independently applied from a second current applied to the bottom coil half.
Claims23
An actuator comprising:
- a magnet arrangement;
- and
- a coil assembly, the coil assembly being arranged to move at least partially within the magnet arrangement, the coil assembly including a top coil half and a bottom coil half, the top coil half and the bottom coil half being arranged to he substantially independently controlled such that a first current applied to the top coil half may be applied substantially independently from a second current applied to the bottom coil half.
An actuator comprising:
- a magnet arrangement;
- and
- a coil assembly, the coil assembly being arranged to move at least partially within the magnet arrangement, the coil assembly including a first coil and a second split coil, wherein the first coil is arranged to provide a substantially non-zero net force along a first axis and the second split coil is arranged to provide a substantially non-zero net force along a second axis, the second axis being substantially perpendicular to the first axis.
20-26. (canceled)
Dependencies are inferred from the claim text.