Semiconductor device and method for fabricating the same
AssigneeOki Electric Industry Co., Ltd.
InventorHirokazu Uchida
Life of this patent
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Abstract
A semiconductor device according to the present invention includes a semiconductor substrate, which comprises a first surface on which an electrode pad is formed, and a second surface arranged at an opposite side of the first surface; an external terminal formed on the first surface of the semiconductor substrate and is electrically connected to the electrode pad; and a sealing resin which seals the first surface so that a surface of the external terminal is exposed. An outer edge of the second surface has a chamfered portion, a surface of which is inclined by substantially 45 degrees from the second surface.
Claims19
A semiconductor device, comprising:
- a semiconductor substrate, which comprises a first surface on which an electrode pad is formed, and a second surface arranged at an opposite side of the first surface;
- an external terminal formed on the first surface of the semiconductor substrate and is electrically connected to the electrode pad;
- and
- a sealing resin which seals the first surface so that a surface of the external terminal is exposed, wherein
- an outer edge of the second surface has a chamfered portion, a surface of which is inclined by substantially 45 degrees from the second surface.
A method for fabricating a semiconductor device, comprising:
- forming a groove on a second surface of a semiconductor substrate, in which the semiconductor wafer comprises a first surface on which a plurality of semiconductor devices are formed and segmented by a dicing line and a second surface arranged at an opposite side of the first surface, the groove is formed along the dicing line, the groove has a inclined surface with a first width which gets narrower toward the first surface;
- and
- dicing the semiconductor wafer along the dicing line with a dicing blade having a second width, which is narrower than the first width.
Dependencies are inferred from the claim text.