Back to results
US 2006/0049355 A1Published application
Condenser Zone Plate Illumination for Point X-Ray Sources
AssigneeJMAR Research, Inc.
InventorScott Bloom
Life of this patent
Estimating the term…
Abstract
Abstract of the Disclosure An improved short-wavelength microscope is described in which a specimen sample is placed between a condenser zone plate lens and an objective zone plate lens so that the specimen is aligned with a diffraction order of the condenser zone plate lens that is greater than one and proximal to the condenser zone plate.
Claims18
A short wavelength microscope device comprising:
- a condenser zone plate operable to receive short wavelength radiation from a point source and focus the short wavelength radiation onto a specimen sample;
- a sample stage onto which the specimen sample can be mounted, wherein the sample stage is operable to be aligned with an order of diffraction of the condenser zone plate that is greater than one;
- and
- an objective zone plate operable to receive short wavelength radiation that has passed through the specimen sample and focus the short wavelength radiation onto an imaging device.
1 more element
An X-ray microscope device operable for imaging a sample with X-rays in the range of about 0.5 to about 160 nm, the microscope device comprising:
- a condenser zone plate operable to receive X-ray radiation from a point source and focus the X-ray radiation onto a specimen sample;
- a sample stage onto which the specimen sample can be mounted, where the sample stage is operable to be aligned with a third order of diffraction of the condenser zone plate that is proximal to the condenser zone plate;
- a pinhole device disposed between the condenser zone plate and the sample stage, wherein the pinhole device permits X-rays of a desired wavelength to pass through the pinhole to the sample stage and blocks radiation of undesired wavelengths from the sample stage;
- an objective zone plate operable to receive X-ray radiation that has passed through the specimen sample and focus the short wavelength radiation onto an imaging device;
- and
- wherein the numerical aperture of the condenser zone plate at the third order of diffraction is greater than or equal to the numerical aperture of the objective zone plate.
3 more elements
A method of imaging microscopic features of a specimen sample comprising:
- mounting a specimen sample on a sample stage;
- providing a point source of short wavelength radiation;
- focusing the short wavelength radiation onto a specimen sample with a condenser zone plate array;
- aligning the sample stage with an order of diffraction of the condenser zone plate that is greater than one and proximal to the condenser zone plate;
- focusing the short wavelength radiation that has passed through the specimen sample with an objective zone plate lens so that the short wavelength radiation is directed onto an imaging device.
2 more elements
Dependencies are inferred from the claim text.