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AssigneeApplied Materials, Inc.
InventorAvi Tepman
Estimating the term…
A rectangular magnetron placed at the back of a rectangular target to intensify the plasma in a sputter reactor configured for sputtering target material onto a rectangular panel. The magnetron has a size only somewhat less than that of the target and is scanned in the two perpendicular directions of the target with a scan length of, for example, about 100 mm for a 2 m target. The scan may follow a double-Z pattern along two links parallel to a target side and the two connecting diagonals. The magnetron includes a closed plasma loop formed in a convolute shape, for example, a rectangularized helix with an inner pole of nearly constant width extending along a single path and having one magnetic polarity completely surrounded by an outer pole having the opposed polarity. External actuators move the magnetron slidably suspended from a gantry which sliding perpendicularly on the chamber walls.
In a plasma sputter reactor which having a chamber and is fittable with a rectangular target for sputtering depositing material of the target onto a rectangular substrate and a magnetron formed in a magnetron plate disposable on a back of the target opposite the substrate, a scan mechanism comprising:
In a plasma sputter reactor which having a chamber and is fittable with a rectangular target for sputtering depositing material of the target onto a rectangular substrate and a magnetron formed in a magnetron plate disposable on a back of the target opposite the substrate, a scan mechanism comprising:
A method of sputtering onto a rectangular substrate, comprising the step of scanning a magnetron in back of a sputtering target along a first two-dimensional multi-part path having at least straight portion.
A method of sputtering onto a rectangular substrate, comprising the step of scanning a magnetron in back of a substantially rectangular sputtering target along a path having straight portions non-parallel to each other.
Dependencies are inferred from the claim text.