Laser ablation apparatus and method of preparing nanoparticles using the same
AssigneeSamsung Electronics Co., Ltd.
InventorsJoo-hyun Lee, Yoon-ho Khang
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Abstract
A laser ablation apparatus and a method of preparing nanoparticles using the same are provided. The laser ablation apparatus may include: a reaction chamber having a discharge space therein; a susceptor on which a target is mounted, disposed inside the reaction chamber; a laser generator causing a plasma discharge by sputtering the target with a laser beam so as to generate positive charges and negative charges in the discharge space; and a high voltage generator attracting the negative charges generated by the plasma discharge to a predetermined position exposed to the plasma discharge by applying a positive bias voltage at the predetermined position.
Claims24
A laser ablation apparatus comprising:
- a reaction chamber having a discharge space therein;
- a susceptor on which a target is mounted, disposed inside the reaction chamber;
- a laser generator causing a plasma discharge by sputtering the target with a laser beam to generate positive charges and negative charges in the discharge space;
- and
- a high voltage generator attracting the negative charges generated by the plasma discharge to a predetermined position exposed to the plasma discharge by applying a positive bias voltage at the predetermined position.
A method of preparing nanoparticles, the method comprising:
- providing a target in a reaction chamber having a discharge space;
- causing plasma discharge by sputtering the target with a laser beam so as to generate positive charges and negative charges in the discharge space;
- and
- applying a positive bias voltage at a predetermined position exposed to the plasma discharge so as to attract the negative charges generated by the plasma discharge to the predetermined position.
Dependencies are inferred from the claim text.