Pressure sensor
AssigneeA/S
InventorJes Vogler
Life of this patent
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Abstract
The invention provides a pressure sensor with a housing for a pressure sensing arrangement, e.g. a semi-conductor arrangement. The housing consists of a bottom part and an intermediate member with a through hole forming a sidewall of a cavity for the pressure sensing arrangement. A membrane is attached to the intermediate member to cover an opening of the cavity, and to allow pressure from outside to propagate into a pressure transmitting medium contained inside the housing and thus to the pressure sensing arrangement therein. The invention also provides a method of making a pressure sensor with a housing of the above-described kind.
Claims12
A pressure sensor comprising a housing with a bottom part and a sidewall extending upwardly and forming an opening in an upper surface of the housing, a pressure sensing arrangement, and a membrane covering the opening to provide a substantially closed cavity in the housing, wherein the housing comprises an intermediary member attached between the bottom part and the membrane and comprising an aperture forming at least a part of the cavity.
A method of making a pressure sensor comprising a housing with a cavity having an opening in an upper surface of the housing, a pressure sensing arrangement placed in the cavity for sensing pressure, and a membrane covering the opening and attached to the housing to provide a substantially dosed space in the cavity, wherein a bottom part and an intermediary member is assembled to form the housing, and wherein the intermediary member is attached between the bottom part and the membrane and forms at least a part of the cavity.
Dependencies are inferred from the claim text.