Photosensitive composition, compound for use in the photosensitive composition, and method of pattern formation with the photosensitive composition
AssigneeFuji Photo Film Co., Ltd.
InventorsKunihiko Kodama, Kenji Wada, Kaoru Iwato
Life of this patent
Estimating the term…
Abstract
A compound which generates a sulfonic acid having one or more —SO3H groups and one or more —SO2— bonds upon irradiation with an actinic ray or a radiation; a photosensitive composition containing the compound; and a method of pattern formation with the photosensitive composition.
Claims21
A photosensitive composition comprising (A) a compound which, upon irradiation with one of an actinic ray and a radiation, generates an acid represented by one of formulae (I) and (I′):
- wherein
- A1 represents a divalent connecting group;
- A2 and A3 each independently represents a single bond, an oxygen atom, or —N(Rx)-;
- Rx represents a hydrogen atom, an aryl group, an alkyl group, or a cycloalkyl group;
- A4 represents a single bond or —C(═O)—;
- Ra represents a hydrogen atom or an organic group;
- n represents 2 or 3;
- Rb represents a connecting group having a valence of n;
- and
- when A3 is —N(Rx)-, Rx may be bonded to one of Ra and Rb to form a ring.
A compound which, upon irradiation with one of an actinic ray and-a radiation, generates an acid represented by one of formulae (I) and (I′):
- wherein
- A1 represents a divalent connecting group;
- A2 and A3 each independently represents a single bond, an oxygen atom, or —N(Rx)-;
- Rx represents a hydrogen atom, an aryl group, an alkyl group, or a cycloalkyl group;
- A4 represents a single bond or —C(═O)—;
- Ra represents a hydrogen atom or an organic group;
- n represents 2 or 3;
- Rb represents a connecting group having a valence of n;
- and
- when A3 is —N(Rx)-, Rx may be bonded to one of Ra and Rb to form a ring.
A sulfonic acid represented by one of formulae (I) and (I′), or a salt thereof:
- wherein
- A1 represents a divalent connecting group;
- A2 and A3 each independently represents a single bond, an oxygen atom, or —N(Rx)-;
- Rx represents a hydrogen atom, an aryl group, an alkyl group, or a cycloalkyl group;
- A4 represents a single bond or —C(═O)—;
- Ra represents a hydrogen atom or an organic group;
- n represents 2 or 3;
- Rb represents a connecting group having a valence of n;
- and
- when A3 is —N(Rx)-, Rx may be bonded to one of Ra and Rb to form a ring.
Dependencies are inferred from the claim text.