Positive working photosensitive composition
AssigneeSumitomo Chemical Company, Limited
InventorIsao Yahagi
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Abstract
A positive working photosensitive composition comprising an epoxy compound having two or more epoxy groups in one molecule, a curing catalyst or a compound for producing a curing catalyst by heat, and sulfonates, a method of manufacturing a member for a semiconductor comprising the steps of applying the positive working photosensitive composition on a substrate to expose, curing an unexposed part by heat, and developing an exposed part, and a method of manufacturing a member for a display comprising the steps of applying the positive working photosensitive composition on a substrate to expose, curing an unexposed part by heat, and developing an exposed part.
Claims4
A positive working photosensitive composition comprising:
- an epoxy compound having two or more epoxy groups in one molecule;
- a curing catalyst or a compound for producing a curing catalyst by heat;
- and
- sulfonates.
Dependencies are inferred from the claim text.