Film

A film obtained by a chemical vapor deposition of a compound represented by any one of formula (Ia) to (Ic) or a composition containing at least the compound represented by any one of formula (Ia) to (Ic):

• in formula (Ia), Ra represents a hydrogen atom, an alkyl group or a silyl group;
• ma represents an integer of 1 to 14;
• Xa represents a halogen atom, an alkyl group, an alkenyl group, an aryl group or a silyl group;
• and
• na represents an integer of 0 to 14, and when a compound includes a plurality of Ra's or a plurality of Xa's, the plurality of Ra's or the plurality of Xa's may be the same or different respectively,
• in formula (Ib), Rb represents a hydrogen atom, an alkyl group, an alkenyl group, an alkynyl group, an aryl group or a silyl group;
• mb represents an integer of 1 to 14;
• Xb represents a halogen atom, an alkyl group, an alkenyl group, an aryl group or a silyl group;
• and
• nb represents an integer of 0 to 14, and when a compound includes a plurality of Rb's or a plurality of Xb's, the plurality of Rb's or the plurality of Xb's may be the same or different respectively,
• in formula (Ic), Rc represents a hydrogen atom, an alkyl group, an aryl group or a silyl group;
• mc represents an integer of 1 to 3;
• Xc represents a halogen atom, an alkyl group, an alkenyl group, an aryl group or a silyl group;
• and
• nc represents an integer of 0 to 9, and when a compound includes a plurality of Rc's or a plurality of Xc's, the plurality of Rc's or the plurality of Xc's may be the same or different respectively.