Thin film sol-gel derived glass
AssigneeOptinetrics, Inc.
InventorEdgar Mendoza
Life of this patent
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Abstract
Thermally-assisted organometallic sol-gel derived glasses have been found to permit fabrication of thin films sufficiently thin for telecom components. Inclusion of a photosensitizer in the film permits light of controlled intensity to modify refractive indices in the film to form useful structures.
Claims15
A glass thin film derived from a thin film of photosensitive sol-gel doped with an organometallic photosensitizer, said organometallic photosensitizer having a formula R-M-X, where X is a photolabile moiety, M is a metal, and R is a volatile organic compound, wherein said thin film of photosensitive sol-gel has a thickness in excess of one micron.
A thin film of sol-gel derived glass on a silica substrate, said film including at least one metal oxide doped silica region of Si—O-M-O—Si with adjacent regions of SiO2, where M is a metal, said film having a thickness substantially in excess of one micron and being free of cracks and lateral shrinkage, and wherein said metal oxide is photodeposited from an organometallic photosensitizer included in the sol-gel used to form said film.
A method for forming a photosensitive sol-gel film including regions of different indices of refraction, said method comprising the steps of forming a photosensitive sol-gel film including an organometallic photosensitizer on a silica substrate, exposing said film through a mask to light of a wavelength and for a time for unbinding different amounts of metal constituents and of said sensitizer in different sections along at least a first channel thereof, exposing said film to heat at a first temperature and for a time to drive off the unbound sensitizer and to bind the metal constituents of said sol-gel film, and exposing said layer to heat at a second temperature higher than said first temperature for a time to unbind and drive off the organic constituents of said sol-gel film.
Dependencies are inferred from the claim text.