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US 2006/0040079 A1Published application
Method of die coating with a die coater
OwnerKazutoshi Sekiharainventor
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OwnerKazutoshi Sekiharainventor
Estimating the term…
The invention provides an inexpensive improved die-coating method for the preparation of a high-quality pellicle membrane used for dust-proof protection of a photomask in the photolithographic patterning works in respect of greatly decreased deposition of foreign matter particles and increased uniformity of the film. The improvement is accomplished by a method comprising the steps of: keeping the coating die end as immersed in the coating solution; gently pulling up the coating die at a rate, for example, not exceeding 2 mm/second until the die end comes apart from the solution; and holding the coating die as pulled up until the drops of the coating solution hanging from the die end disappear by means of the surface tension of the solution giving a flat, smooth end surface of the coating die prior to the start of the coating works on a substrate surface with the coating solution ejected from the slit in the coating die end followed by drying and peeling of the resin film off the substrate surface.
In a die coating method for the preparation of a resin film for use as a pellicle membrane in a framed pellicle by coating a flat surface of a substrate with a resin-containing coating solution ejected from a slit in the lower end of a coating die to be uniformly spread over the substrate surface followed by drying, an improvement which comprises the steps of:
Dependencies are inferred from the claim text.