Discharge-enhanced atmospheric pressure chemical vapor deposition
OwnerThomas Culp, Roman Korotkov +1inventors
InventorsThomas Culp, Roman Korotkov, Ravi Gupta
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Abstract
A discharge-enhanced CVD apparatus and method utilizes a nozzle containing electrodes to generate a high voltage electrical discharge at or near atmospheric pressure in the absence of a stabilizing or arc-suppressing noble gas. Reactants are passed directly through or/and under the discharge before being directed to the surface of a substrate to be coated.
Claims26
A method for surface treating or coating a substrate comprising the steps of:
- a) positioning an electrode assembly above a substrate;
- b) generating a high voltage discharge;
- c) passing reactants and carrier gas through and/or under the electrical discharge to the substrate, resulting in modification of the substrate surface.
A nozzle for discharge-enhanced chemical vapor deposition utilizing glow and corona discharges, comprising:
- an inlet arranged to receive a carrier gas and vaporized reactants;
- at least two electrodes between which the carrier gas and vaporized reactants pass, said electrodes being connected to an electrical power source to cause a discharge to form between said electrodes and thereby energize said reactants;
- an outlet arranged to direct said energized reactants to a substrate,
- wherein said discharge is a high voltage discharge generated in the absence of a stabilizing or arc-suppressing gas.
Apparatus for discharge-enhanced chemical vapor deposition utilizing arc discharges, comprising:
- at least two electrodes between which a carrier gas and vaporized reactants pass, said two electrodes being positioned on a same side of a substrate;
- and
- a high voltage power source arranged to cause a discharge to form between said electrodes and thereby energize said reactants;
- wherein said discharge is a high voltage discharge generated in the absence of a stabilizing or arc-suppressing gas.
A method of coating or surface treating a substrate, comprising the steps of:
- positioning at least two electrodes above a substrate;
- generating a high voltage discharge between the electrodes in the absence of a stabilizing or arc-suppressing gas;
- passing a carrier gas and reactants between the electrodes in order to energize the reactants and cause them to react with the substrate and form a coating thereon.
Dependencies are inferred from the claim text.