Mems fluid actuator

A method of operating a microelectromechanical fluid ejector to achieve a predetermined mechanical deflection, the method comprising:

• calculating a pulse width driving a resistor layer of a microelectromechanical fluid ejector to provide a predetermined mechanical deflection by acknowledging a voltage that will drive the microelectromechanical fluid ejector, a pertinent volume of the resistor layer, and an expected change in a temperature field of the microelectromechanical fluid ejector as a result of being driven;
• and
• operating the microelectromechanical fluid ejector using the calculated pulse width to eject a droplet of fluid from a nozzle, wherein the droplet is within a predetermined volume range.

A method of operating a microelectromechanical fluid ejector, the method comprising:

• calculating a cycle time of a microelectromechanical fluid ejector using a shape of the microelectromechanical fluid ejector, a current that will be used to drive the microelectromechanical fluid actuator, a pulse width of the current, and material properties of each material comprising the microelectromechanical fluid ejector;
• and
• operating the microelectromechanical fluid ejector using the calculated cycle time to eject a droplet of fluid from a nozzle, wherein the droplet is within a predetermined volume range.

A thermal deformation tool for use in selective deposition of a fluid onto a surface comprising:

• a repositionable actuator including a first material having a first thermal expansion coefficient adjacent to a second material having a second thermal expansion coefficient, the first thermal expansion coefficient being greater than the second thermal expansion coefficient, the repositionable actuator being fabricated to exhibit nonuniform current density between a first point and a second point spaced along a length of the repositionable actuator, wherein a point of maximum deflection of the repositionable actuator is nearer the second point than the first point, wherein the repositionable actuator is subjected to temperature variances causing the first material to expand or contract at a greater rate than the second material, and wherein the repositionable actuator is adapted to displace more than one picoliter per microjoule.

An apparatus for selective deposition of a fluid onto a surface, the apparatus comprising:

• an adaptable beam that includes a cross section along the length thereof comprising a first layer of a first material, a first layer of a second material, and a second layer of a first material, wherein a thickness of the first layer of the first material is greater than ten times a thickness of the second layer of the first material, wherein a thermal expansion coefficient of the second material is greater than a thermal expansion coefficient of the first material;
• and
• a chamber adapted to house the adaptable beam at least partially therein, the chamber also adapted to include at least one orifice to allow expelling of a fluid from the chamber by actuation of the adaptable beam upon being subjected to temperature variances.

A method of operating an apparatus for selective deposition of a fluid onto a surface, the method comprising:

• supplying a reservoir with a fluid, the reservoir including at least one orifice to allow expelling of the fluid from the reservoir, the reservoir at least partially housing an actuator therein;
• and
• resistively heating the actuator to reposition the actuator from a first position to a second position, wherein the second position is closer to the orifice than the first position, the actuator including a first insulating layer, a first conductive layer, and a second insulating layer, wherein the first insulating layer is greater than ten times a thickness of the second insulating layer and the first conductive layer at least partially separates the first insulating layer from the second insulating layer, wherein the first insulating layer is nearer to the orifice than the second insulating layer, and wherein the actuator is adapted to displace more than one picoliter per microjoule.

A thermal deformation tool for use in selective deposition of a fluid onto a surface comprising:

• an adaptable beam comprising a first material having a first thermal expansion coefficient at least partially encased by a second material having a second thermal expansion coefficient, the first thermal expansion coefficient being greater than the second thermal expansion coefficient, the adaptable beam having a length greater than a width and a height thereof, a cross section along the length of the adaptable beam comprising a first layer of the first material, a first layer of the second material, and a second layer of the first material, wherein a thickness of the first layer of the first material is greater than ten times a thickness of the second layer of the first material.

A method for operating an apparatus adapted for selective deposition of a fluid onto a surface, the method comprising:

• oscillating a repositionable beam between a first position and a second position to allow expelling of a fluid from a chamber through an orifice by movement of the repositionable beam, the chamber being adapted to house the repositionable beam at least partially therein, and the repositionable beam comprising a first material having a first thermal expansion coefficient adjacent to a second material having a second thermal expansion coefficient, the first thermal expansion coefficient being less than the second thermal expansion coefficient;
• wherein the act of oscillating includes heating the repositionable beam such that a surface temperature of the repositionable beam does not exceed about 300 degrees Celsius.

An apparatus for selective deposition of a fluid onto a surface, the apparatus comprising:

• an oscillating beam comprising a first material having a first thermal expansion coefficient adjacent to a second material having a second thermal expansion coefficient, the first thermal expansion coefficient being less than the second thermal expansion coefficient, wherein the oscillating beam has a nonuniform current density and has surface pores less than between about 0.1 microns and about 0.01 microns in depth;
• and
• a chamber adapted to house the adaptable beam at least partially therein, the chamber also adapted to include at least one orifice for expelling a fluid from the chamber by actuation of the oscillating beam.

A method of operating a microelectromechanical fluid ejector to eject a particular volume of fluid, the method comprising:

• calculating a voltage applied to a microelectromechanical actuator to displace a predetermined volume droplet from a nozzle of a printing apparatus by factoring in a current density for each element of the microelectromechanical actuator and Joule heating for each element of the microelectromechanical actuator;
• and
• applying the calculated voltage to the microelectromechanical actuator to eject a droplet of fluid from a nozzle, wherein the droplet is within a predetermined volume range.

A method of operating a microelectromechanical fluid ejector to eject a particular volume of fluid, the method comprising:

• calculating a pulse width, to be applied to a microelectromechanical actuator to displace a predetermined volume droplet from a nozzle of a printing apparatus, taking into consideration Joule heating for each element of the microelectromechanical actuator, wherein a current density for each of the elements is taken into consideration to determine the Joule heating;
• and
• applying a pulse to the microelectromechanical actuator using the pulse width calculated to eject a droplet of fluid from a nozzle, wherein the droplet is within a predetermined volume range.

A method of operating a microelectromechanical fluid ejector to eject a particular volume of fluid, the method comprising:

• measuring, in-situ, the electrical resistance of a microelectromechanical fluid ejector;
• and
• adjusting at least one of a voltage delivered to the microelectromechanical fluid ejector and a pulse width applied to the microelectromechanical fluid ejector to maintain joule heating of the microelectromechanical fluid ejector within a predetermined range.

An apparatus adapted for use in selective deposition of a fluid onto a surface, the apparatus comprising:

• a plurality of micromachined fluid ejectors arranged to operatively provide a vertical resolution of at least 300 dots per inch, wherein each micromachined fluid ejector comprises a first material having a first thermal expansion coefficient at least partially encased by a second material having a second thermal expansion coefficient, the first thermal expansion coefficient being greater than the second thermal expansion coefficient, and each micromachined fluid ejector having a length greater than a width and a height thereof, a cross section along the length of the adaptable beam comprising a first layer of the first material, a first layer of the second material, wherein a thickness of the first layer of the first material is greater than ten times a thickness of the second layer of the first material.