Loading patent…
AssigneeApplied Materials, Inc.
InventorsShinichi Kurita, Emanuel Beer, Hung Nguyen, Benjamin Johnston, Fayez Abboud
Estimating the term…
A method and integrated system for electron beam testing a substrate is provided. In one aspect, the integrated system includes an electron beam testing chamber having a substrate table disposed therein. The substrate table is capable of moving a substrate within the testing chamber in both horizontal and vertical directions. The system also includes a load lock chamber disposed adjacent a first side of the testing chamber, and a prober storage assembly disposed beneath the testing chamber. A prober transfer assembly is disposed adjacent a second side of the testing chamber and arranged to transfer one or more probers between the prober storage assembly and the testing chamber. Further, one or more electron beam testing devices are disposed on an upper surface of the testing chamber.
A chamber for processing a substrate, comprising:
A testing table for supporting and transferring a large area substrate, the testing table comprising:
A prober exchange apparatus, comprising:
A method of transferring one or more probers into and out of an electron beam testing chamber, comprising:
Dependencies are inferred from the claim text.